송풍근  사진
송풍근
영문 성명
Song, Pung Keun
연락처
051)510-3579
이메일
pksong@pusan.ac.kr
홈페이지
광전자재료연구실
전공
플라즈마공학, 기능성박막재료
학력
Univ. of Tokyo Dept. of Applied Chemistry Ph.D

● 연구 분야
  - 플라즈마 공정 설계 및 박막 물성평가

  - 디스플레이용 투명산화물산화물 반도체

  - 수처리 및 폐기물 처리 용 고효율 B-doped diamond 양극재료 합성 및 평가

  - 에너지 하베스팅용 열전재료

  - 탄소저감을 위한 고효율 변색재료(Chromism)박막, 하이브리드구조 면상발열체, 열선반사막 코팅

  - 광촉매 박막, 연료전지용 분리막코팅


● 수행중인 연구과제

  - Flexible display용 저투습 산화물 보호막 제조 기술 개발

  - 윈도우 일체형 30인치급 터치센서 개발 (ETRI)

  - 60인치 이상 정전용량방식 및 광학방식 멀티터치 기술개발 (디스플레이협회)

  - 저 저항 투명 전도성 필름 개발 (LG 화학)

  - TCO 타깃 아킹 및 노쥴 형성 억제 기술 (삼성 어드밴스드 글라스)

  - 직접변환방식 고감도 X-선 검출 센서용 광도전체 및 전극 증착기술 개발

  - 불용성 양극전극개발 및 전기영동/침투 시스템 전극 설계

  - 저비용 고효율 대면적 불용성전극 제조 기술 및 고효율 전기침투탈수 장치 개발

  - 친환경 해수 재활용을 위한 난분해성 유기물 저감 B-DAF 시스템 개발

  - 해양쓰레기 선상 처리를 위한 핵심 모듈 개발 및 선박 실증


● 주요 경력

  - 부산대학교 재료공학부 정교수 (2013년 4월 ~ 현재)

  - 한국진공학회 홍보이사 (2015년 1월 ~ 현재)

  - 한국표면공학회 부회장 (2014년 1월 ~ 2019년 12월)

  - 한국표면공학회 회장 (2020년 1월 ~ 2021년 12월)

  - 수송기기 하이테크 소재부품 창의연구인력양성 사업단 단장(2013년 10월 ~ 2016년 6월)

  - 삼성코닝어드밴스드글라스 기술 고문 (2012년 10월~ 2019년 12월)

  - 한국 감성 터치 협회 감사 (2012년 1월 ~ 현재)

  - 한국표면공학회 총무이사 (2012년 1월 ~ 2013년 12월)

  - 부산대학교 재료공학부 부교수 (2008년 5월 ~ 2013년 3월)

  - 한국표면공학회 학술이사 (2008년 1월 ~ 2009년 12월)

  - 한국재료학회 학술이사 (2007년 1월 ~ 현재)

  - 부산대학교 동남권부품소재 산학협력혁신사업단 인력양성센터장 (2007년 1월 ~ 2010년 12월)

  - 부산대학교 재료공학부 조교수 (2004년 5월 ~ 2008년 4월)

  - 한국표면공학회 사업이사 (2004년 5월 ~ 2007년 12월)

  - 일본 아오야마 가꾸인대학 주임 조수 (1999년 4월 ~ 2004년 4월)

  - 일본정보처리 기기용 디스플레이의 시험평가 방법의 표준화 위원회 기술위원 (2000년 7월 ~ 2002년 3월)

  - 일본투명산화물 박막 응용제품의 국제 동향 조사연구위원회 기술위원 (2000년 4월 ~ 2001년 9월)

  - 일본학술진흥회, 광전자 산화물 재료 제166 위원회 간사 (1999년 4월 ~ 2004년 3월)

  - 일본응용물리학회 정회원 (1999년 4월 ~ 현재)

  - 동경대학 생산기술 연구소 연구원 (1998년 9월 ~ 1999년 3월)



● 국외전문학술지 게재 논문

1. Development of boron doped diamond electrodes material for heavy metal ion sensor with high sensitivity and durability, S. Kim, Y. S. Jeong, M. O. Park, Y. J. Jang, J. S. Bae, K. S. Hong, S. H. Kim, J. H. Yoon, P. K. Song, JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY, 23 (2023) 1375-1385

2. Thermochromic properties of vanadium oxide thin films prepared by reactive magnetron sputtering at different oxygen concentrations, Kholida Tul Khairy, S. H. Kim, Y. H. Song, Montero. Jose, Osterlund, Lars, J. H. Yoon, P. K. Song, VACUUM, 210 (2023) 111887

3. Embedded nanopattern for selectively suppressed thermal conductivity and enhanced transparency in a transparent conducting oxide film, S. H. Kim, Y. J. Choi, Y. J. Choi, Montero. Jose, Osterlund, Lars, J. H. Yoon, P. K. Song, NANO ENERGY, 103 (2022) 107757-117764

4. Performance of Insoluble IrO2 Anode for Sewage Sludge Cake Electrodehydration Application with Respect to Operation Conditions, N. Y. Lee, S. H. Kim, J. M. Lee, M. Y. You, P. K. Song, COATINGS, 12,6 (2022) 724-732

5. Effects of Composition on the Electromagnetic Wave Shielding/Absorption and Corrosion in Zn-Ni Alloy Thin Film, J. W. Lim, A. R. Kwon, Y. H. Kim, Y. J. Kim, P. K. Song, KOREAN JOURNAL OF METALS AND MATERIALS, 50,1 (2022) 62-67

6. Effect of pre-treatment in 0.5 M oxalic acid containing various NH4F concentrations on PEO Film Formation of AZ91 Mg Alloy, D. Y. Kwon, S. M. Moon, P. K. Song, 55,1 (2022) 24-31

7. Embedded Oxidized Ag-Pd-Cu Ultrathin Metal Alloy Film Prepared at Low Temperature with Excellent Electronic, Optical, and Mechanical Properties, S. H. Kim, S. M. Park, Y. J. Choi, Montero. Jose, Osterlund. Lars, J. H. Yoon, P. K. Song, ACS APPLIED MATERIALS & INTERFACES, 14,13 (2022) 15756-15764

8. Evaluation method of the light-trapping structure for a transparent thin-film silicon solar cell with low-illuminance condition, S. W. Choi, J. H. Kim, Y. H. Kim, J. D. Kwon, J. H. Park, M. H. Park, P. K. Song, SOLAR ENERGY, 231 (2022) 1107-1114

9. Proposing a new solution for marine debris by utilizing on-board low-temperature eco-friendly pulverization system, D. H. Lee, J. M. Lee, S. K. Park, K. M. Choi, B. H. Yoon, J. E. Oh, J. K. Seo, S. K. Kim, H. T. Kim, J. D. Kim, J. H. Kim, D. H. Lim, P. K. Song, SCIENTIFIC REPORTS, 11,1 (2021) 243664-243676

10. Controlled lattice thermal conductivity of transparent conductive oxide thin film via localized vibration of doping atoms, Y. J. Choi, H. Y. Lee, S. H. Kim, P. K. Song, NANOMATERIALS, 11,9 (2021) 1-8

11. Effect of pre-treatment of AZ91 Mg alloy in HF solution on PEO film formation behavior, D. Y. Kwon, D. Y. Kwon, S. M. Moon, P. K. Song, Journal of the Korean institute of surface engineering, 54,4 (2021) 184-193

12. Hydrogen-driven surface amorphization of the transparent oxide semiconductor thin-films for photovoltaic applications, S. H. Kim, J. H. Yoon, S. M. Park, J. H. Bang, P. K. Song, APPLIED SURFACE SCIENCE, 555,30 (2021) 1-5

13. Hydrogen-driven dramatically improved mechanical properties of amorphized ITO-Ag-ITO thin films, S. M. Park, J. H. Yoon, S. H. Kim, P. K. Song, RSC Advances, 11,6 (2021) 3439-3444

14. Electrochemical Properties and Chemical Oxygen Demand Depending on the Thickness of Boron-Doped Diamond, C. W. Song, M. Y. You, J. M. Lee, D. S. Cho, P. K. Song, COATINGS, 10,11 (2020) 1097

15. Diamond Crystal Growth Behavior by Hot Filament Chemical Vapor Deposition According to Pretreatment Conditions, C. W. Song, M. Y. You, D. M. Lee, H. S. Moon, S. H. Kim, P. K. Song, Journal of the Korean institute of surface engineering, 53,5 (2020) 241-248

16. Effect of working pressure on the properties of RF sputtered SnS thin films and photovoltaic performance of SnS-based solar cells, S. I. Son, D. H. Shin, Y. G. Son, C. S. Son, D. R. Kim, J. H. Park, S. H. Kim, D. H. Hwang, P. K. Song, JOURNAL OF ALLOYS AND COMPOUNDS, 831 (2020) 154626

17. Effect of Boron Doping on Diamond Film and Electrochemical Properties of BDD According to Thickness and Morphology, C. W. Song, D. S. Joo, J. M. Lee, P. K. Song, COATINGS, 10,4 (2020) 331

18. Thermoelectric Properties of Zinc-Doped Indium Tin Oxide Thin Films Prepared Using the Magnetron Co-Sputtering Method, H. Y. Lee, S. H. Kim, I. J. Yang, J. H. Yoon, S. H. Jin, P. K. Song, COATINGS, 9,12 (2019) 788

19. P/i interfacial engineering in semi-transparent silicon thin film solar cells for fabrication at a low temperature of 150 degrees C, S. W. Choi, J. H. Yang, J. H. Park, S. J. Han, D. W. Kang, J. D. Kwon, P. K. Song, CURRENT APPLIED PHYSICS, 19,10 (2019) 1120-1126

20. High energy and power density of self-grown CuS@Cu2O core-shell supercapattery positrode, H. W. Lee, Nanasaheb M. Shinde, Pritamkumar V. Shinde, J. M. Yoon, K. H. Kim, P. K. Song, JOURNAL OF SOLID STATE ELECTROCHEMISTRY, 23,9 (2019) 2607-2617

21. Stabilizing of Mechanical Property of Amorphous In-Zn-O Thin Films with Hydrogen Flow, S. H. Kim, J. H. Yoon, S. H. Jin, J. H. Bang, P. K. Song, COATINGS, 9,8 (2019) 485

22. Optimization of bending durability of Ti-ZnO thin films on flexible glass substrates with highly enhanced optoelectronic characteristics by atomic layer deposition, W. J. Lee, S Bera, J. W. Leee, Wei Dai, H. C. Kim, C. S. Kim, S. H. Kwon, P. K. Song, Japanese Journal of Applied Physics, 58,7 (2019) 75501

23. Performance of BDD Electrodes Prepared on Various Substrates for Wastewater Treatment, J. I. Kwon, M. Y. You, S. H. Kim, P. K. Song, Journal of the Korean institute of surface engineering, 52,2 (2019) 53-57

24. Effects of Yttrium Doping on a-IGZO Thin Films for Use as a Channel Layer in Thin-Film Transistors, S. H. Cho, M. S. Lee, S. H. Kim, D. Y. Kim, J. S. Byeon, P. K. Song, 9,1 (2019) 1-8

25. Effect of hydrogen on mechanical stability of amorphous In-Sn-O thin films for flexible electronics, S. H. Kim, J. H. Yoon, J. H. Bang, P. K. Song, THIN SOLID FILMS, 669 (2019) 275-280

26. Transparent Amorphous Oxide Semiconductor as Excellent Thermoelectric Materials, S. H. Kim, D. G. Kim, J. Y. Byeon, J. H. Lim, J. Y. Song, S. H. Park, C. H. Park, P. K. Song, COATINGS, 8,12 (2018) 462-473

27. Characteristics of indium zinc oxide/silver/indium zinc oxide multilayer thin films prepared by magnetron sputtering as flexible transparent film heaters, P Zhao, S. H. Kim, S. H. Yoon, P. K. Song, THIN SOLID FILMS, 665,1 (2018) 137-142

28. Effect of C2H2/H-2 Gas Mixture Ratio in Direct Low-Temperature Vacuum Carburization, Y. H. Song, J. H. Kim, G. S. Kim, S. G. Kim, P. K. Song, METALS, 8,7 (2018) 493-505

29. Effect of TiN Layer on Boron Doped Diamond/Ti Electrodes for Wastewater Treatment, S. H. Kim, M. Y. You, W. R. Kim, P. K. Song, NANOSCIENCE AND NANOTECHNOLOGY LETTERS, 10,5-6 (2018) 830-834

30. Characteristics of Boron-Doped Diamond Electrodes Deposited on Titanium Substrate with TiNx Interlayer, S. Kim, S. H. Kim, M. Y. You, J. H. Yoon, P. K. Song, NANOSCIENCE AND NANOTECHNOLOGY LETTERS, 10,5-6 (2018) 722-727

31. Near Infrared Reflecting Properties of TiO2/Ag/TiO2 Multilayers Prepared by DC/RF Magnetron Sputtering, S. H. Kim, S. H. Kim, P. K. Song, KOREAN JOURNAL OF METALS AND MATERIALS, 55,8 (2017) 581-586

32. Effect of a CIGS Absorption Layer on the Film Properties of Molybdenum Back Contact, S. H. Cho, H. J. Kim, D. H. Lee, S. H. Lee, G. H. Song, P. K. Song, SCIENCE OF ADVANCED MATERIALS, 9,2 (2017) 244-248

33. Thermoelectric and electrical properties of micro-quantity Sn-doped amorphous indium-zinc oxide thin films, J. Y. Byeon, S. H. Kim, J. H. Lim, J. Y. Song, S. H. Park, P. K. Song, Japanese Journal of Applied Physics, 56,1 (2017) 010304-1-010304-3

34. Thin Metal Meshes for Touch Screen Panel Prepared by Photolithography, S. H. Kim, P. K. Song, Journal of the Korean institute of surface engineering, 49,6 (2016) 575-579

35. Characteristics of ITO/Ag/ITO Hybrid Layers Prepared by Magnetron Sputtering for Transparent Film Heaters, J. Y. Kim, S. H. YOON, S. H. Kim, P. K. Song, Journal of the Optical Society of Korea, 20,6 (2016) 807-812

36. Electrical Properties of Ultrathin Indium Tin Oxide Films in Relation to Sputtering Voltage-Current, S. Y. Park, S. H. Kim, P. K. Song, SCIENCE OF ADVANCED MATERIALS, 8,10 (2016) 1912-1918

37. Characterization of Thick Films of Cadmium Telluride for Direct Conversion X-ray Detectors, S. H. Kim, P. K. Song, SCIENCE OF ADVANCED MATERIALS, 8,9 (2016) 1799-1808

38. Microstructure of evaporated or sputtered CdTe films in relation to heat treatment, S. H. Kim, P. K. Song, JOURNAL OF CERAMIC PROCESSING RESEARCH, 17,3 (2016) 265-270

39. High crystallization of ultra-thin indium tin oxide films prepared by direct current magnetron sputtering with post-annealing, M. J. Kim, P. K. Song, SCIENCE OF ADVANCED MATERIALS, 8,3 (2016) 622-626

40. Characteristics of Micro-quantity Sn Addition to Amorphous Indium-Zinc-Oxide Thin Films Deposited by Using DC Magnetron Sputtering, D. Y. Kim, M. J. Kim, P. K. Song, Journal of the Korean Physical Society, 67,6 (2015) 1056-1063

41. Effects of the cathode magnetic field strength on the properties of sputtered ultrathin ITO films, S. Y. Park, M. J. Kim, P. K. Song, JOURNAL OF CERAMIC PROCESSING RESEARCH, 16 (2015) 267-271

42. Electrical Properties of ITO Thin Film Deposited by Reactive DC Magnetron Sputtering using Various Sn Concentration Target, M. J. Kim, H. H. Jung, P. K. Song, Journal of the Korean institute of surface engineering, 47,6 (2014) 311-315

43. Influence of the Tin Concentration in Indium Tin Oxide (ITO) Films Deposited by DC Magnetron Sputtering for Touch Panels, H. J. Kim, S. H. Lee, J. I. Woo, G. H. Song, P. K. Song, Journal of Nanoelectronics and Optoelectronics, 9,3 (2014) 414-418

44. Characteristic of the CIGS Films Deposited Using Single Sintered Disc by Magnetron Sputtering System, S. H. Cho, W. S. Jung, G. H. Lee, P. K. Song, Journal of Nanoelectronics and Optoelectronics, 9,2 (2014) 368-373

45. Effect of cerium doping on the electrical properties of ultrathin indium tin oxide films for application in touch sensors, S. W. Kang, S. H. Cho, P. K. Song, THIN SOLID FILMS, 559 (2014) 92-95

46. Crystallinity, etchability, electrical and mechanical properties of Ga doped amorphous indiumtin oxide thin films deposited by direct current,H. J. Lee, P. K. Song,THIN SOLID FILMS,559 (2014) 53-57

47. Effect of cerium doping on the electrical properties of ultrathin indium tin oxide films for application in touch sensors,S. W. Kang, S. H. Cho, P. K. Song, THIN SOLID FILMS, 559 (2014) 92-95

48. Investigation on Properties of Molybdenum Thin Films for CIGS Solar Cells,S. H. Cho, H. J. Kim, S. H. Lee, J. I. Woo, K. H. Song, and P. K. Song, Journal of Nanoelectronics and Optoelectronics, 9,2(2014)167-172

49. Characteristic of Ultrathin ITO Films with Sn Concentration Deposited by RF Superimposed DC Sputtering, S. W. Kang, S. H. Cho, W. S. Cheong, G. H. Lee, and P. K. Song, Journal of Nanoelectronics and Optoelectronics,9,2 (2014) 157-161

50. Enhanced corrosion resistance and fuel cell performance of Al1050 bipolar plate coated with TiN/Ti double layer,E. K. Lee, J. K. Kim, T. J. Kim, H. N. Song, J. H. Kim, S. A. Park, T. G.Jeong, S. W. Yun, J. H. Lee, J. H. Goo, J. H. Kim, B. G. Park, H. H. Chun, P. K. Song, C. G. Kang, Y. T. Kim, ENERGY CONVERSION AND MANAGEMENT, 75 (2013) 727-733

51. Characteristic Corrosion Resistance of Nanocrystalline TIN Films Prepared by High Density Plasma Reactive Magnetron Sputtering, J. H. Kim, C. G. Kang, Y. T. Kim, W. S. Cheong, and P. K. Song, JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, Vol.13 (2013) 4601-4607

52. Dependence of electrical and mechanical durability on Zn content and heat treatment for co-sputtered ITZO films, S. H. Kwon, J. H. Jung, W. S. Cheong, G. H. Lee, and P. K. Song,CURRENT APPLIED PHYSICS, Vol.12 (2012) 59-63

53. Influence of Nb2O5 interlayer on permeability of oxide multilayers on flexible substrate, S. H. Cho, H. J. Kim, S. H. Lee, K. H. Song, P. K. Song, CURRENT APPLIED PHYSICS,Vol.12 (2012 )85-88

54. Effects of Sn Concentration on Ultrathin ITO Films Deposited Using DC Magnetron Sputtering,S. W. Kang, H. J. Lee, S. H. Cho, W. S. Cheong,G. H. Lee, and P. K. Song, Journal of Nanoelectronics and Optoelectronics, Vol.7 (2012) 494-497

55. Characteristics of NiO/AZO thin films deposited by magnetron co-sputtering in an O2 atmosphere, H. W. Park, J. H. Park, K. N. Hui, W. S. Jang, B. S. Kang, P. K. Song, Materials Letters, Vol.74 (2012) 30 - 32

56. In-situ electrical resistance measurement for determining minimum continuous thickness of Sn films by DC magnetron sputtering, N. H. Kwan, K. N. Hui, S. H. Kwan,P. K. Song, Y. R. Cho, Materials Letters, Vol.73 (2012) 62 - 64

57. Synthesis and characterization of NiO-doped p-type AZO films fabricated by sol-gel method,L. Li, H. W. Lee, K. S. Hui, S. H Cho, S.K. Lee, W. Zhou, D.H. Hwang, P. K. Song, Y. K. Son, H. S. Lee, Y.R. Cho, K.N. Hui,Material Letters, Vol.68 (2012) 283 - 286

58. Effects of Ga concentration on electrical and physical properties of amorphous Ga-Zn-Sn-O semiconductor thin films, H. R. Kim, J. Y. Kim, S. H. Lee, G. H. Lee, P. K. Song, Y. C. Kang, D. H. Kim, Electrochemical and Solid State Letters, Vol.14, Issue.10 (2011) 411 - 414

59. Amorphous in-Sn-Zn-O films Deposited on polymer and glass substrates using Co-Sputtering System, J. H. Bang, D. Y. Lee, S. H. Kim, W. S. Jung, P.K. Song, Journal of Nanoelectronics and Optoelectronics, Vol.6, Issue.3 (2011) 369 - 374

60. Mechanical and structural properties of high temperature a-ITO:Sm films deposited on polyimide substrate by DC magnetron sputtering, T. D. Jung, P. K. Song, Current Applied Physics, Vol.11, Issue.3 (2011) 314 - 319

61. Effects of hydrogen doping on the electrical properties of Zinc-Tin-oxide thin films, H. R. Kim, P. K Song, Japanese Journal of Applied Physics, Vol.49 (2010) 121101 - 121102

62. Characteristics of amorphous Yb-doped ITO films deposited on polyimide substrate by DC magnetron sputtering, T. D. Jung, S. I. Kim, P.K. Song, Surface & Coatings Technology, Vol.205, Issue.1 (2010) S318 - S323

63. Effect of TiO2 buffer layer thickness on properties of ITZO films deposited on flexible substrate, S.H. Kwan, Y.M. Kang, Y.R. Cho, S.H. Kim, P.K. Song, Surface & Coatings Technology, Vol.205, Issue.1 (2010) 312 - 317

64. Study on mechanical and electro-optical properties of ITO/CeO2filmsdepositedonPIsubstrateforflexibleorganicsolarcells,Y.M.Kang,S.H.Kwan,P.K.Song,CurrentAppliedPhysics,Vol.10,Issue.3(2010)491-494

65. Characteristics of Al-doped, Ga-doped and In-doped zinc-oxide films as transparent conducting electrodes in organic light-emitting diodes, S. H. Park, J. B. Park, P. K. Song, Current Applied Physics, Vol.10, Issue.3 (2010) 488 - 490

66. Electrical and structural properties of In-doped ZnO films deposited by RF superimposed DC magnetron sputtering system, J. B. Park, S. H Kwan, P. K. Song, Journal of Physics and Chemistry of Solids, Vol.71 (2010) 669 - 672

67. Enhanced characterization of ITO films deposited on PET by RF superimposed DC magnetron sputtering, S. I. Kim, T. D. Jung, P. K. Song, Thins Solid Films, Vol.518 (2010) 3085 - 3088

68. Properties of Ce-doped ITO films deposited on polymer on substrate by DC magnetron sputtering, Y. M. Kang, S. H. Kwan, J. H. Choi, Y. J. Jo, P. K. Song, Thin Solid Films, Vol.518 (2010) 3081 - 3084

69. Transparent Conductive ITZO Films Deposited by Using a Magnetron Co-Sputtering System Using Two Cathodes,Y. M. Kang, D.Y. Lee, J.R. Lee, G.H. Lee, J.H. Yoon, P.K. Song, Journal of the Korean Physical Society, Vol.55, Issue.5 (2009) 1901 - 1905

70. Microstructure and Electrical Properties of Yb- or Sm-Doped Indium-Tin-Oxide Films Prepared by DC Magnetron Sputtering, S.R. Choi, S.H. Cho, S.I. Kim, Y.M. Kang, H.H. Yoon, K.H. Kim, P.K. Song, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, Vol.48 (2009) 05EC03-1 ~ 05EC03-4

71. Effect of Substrate Temperature on Properties of Indium-Tin-Oxide Films Deposited on Poly(ethylene terephthalate) Substrate by DC Magnetron Sputtering , D.Y. Lee, G.H. Lee, P.K. Song, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, Vol.48 (2009) 05EC03-1 ~ 05EC03-4

72. Effect of tin concentration on properties of indium tin oxide films deposited on PET substrate under various conditions, Y. M. Kang, D.Y. Lee, J.R. Lee, G.H. Lee, Y.R. Cho , P.K. Song, CURRENT APPLIED PHYSICS, Vol.9 (2009) s262 - s265

73. Properties of ITO films deposited by RF superimposed DC magnetron sputtering, S. I. Kim, S.H. Cho, S.R. Cho, H.H. Yoon, P.K. Song, CURRENT APPLIED PHYSICS, Vol.9 (2009) s262 - s265

74. Characteristics of ITO Films Deposited on a PET Substrate Under Various Deposition Conditions, J.R. Lee, D. Y.Lee, D.K. Kim, G.H. Lee, Y.D. Kim, P.K. Song, METALS AND MATERIALS INTERNATIONAL, Vol.14 (2008) 745 ~ 751

75. A study of transparent conductive indium antimony oxide films deposited by RF magnetron sputtering, S.H. Cho, P.K. Song, METALS AND MATERIALS INTERNATIONAL, Vol.14 (2008) 505-509

76. Study on In-Zn-Sn-O and In-Sn-Zn-O films deposited on PET substrate by magnetron co-sputtering system,D.Y. Lee, J.R. Lee, G.H. Lee, P.K. Song, SURFACE & COATINGS TECHNOLOGY, Vol.202 (2008)5718-5723

77. Characteristic of Ga-doped ZnO films deposited by DC magnetron sputtering with a sintered ceramic ZnO : Ga target, J.C. Lee, Y. D.Kim, J.H. Lee, Y.S. Kim, C.S. Son, P.K. Song, Journal of the Korean Physical Society , Vol.53 (2008) 416-420

78. Effect of sputtering conditions on the mechanical property and the permeability of IZO grown by DC magnetron sputtering for application to flexible OLEDs,K.Y.Cheon, D.Y. Lee, Y.R. Cho, G.H. Lee, P.K. Song, Journal of the Korean Physical Society, Vol.53, Issue.1 (2008) 396-401

79. Effects of O-2 addition on microstructure and electrical property for ITO films deposited with several kinds of ITO targets,S.H. Cho, J.H. Park, S.C. Lee, W.S. Cho, J.H. Lee, H.H. Yoon, P.K. Song, JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS , Vol.69 (2008) 1334-1337

80. Study on In-Sn-Zn-O Films Deposited Using ITO Targets with Various SnO2 Concentrations by Magnetron Co-Sputtering,D.Y. Lee, J.R. Lee, G.H. Lee, G.R. Kim, P.K. Song, Smart Processing Technology, Vol.2 (2008) 149-152

81. Deposition of ISZO films on polymer substrate using two cathodes, J.R. Lee, D.Y. Lee, D.K. Lee, G.H. Lee, P.K. Song, Materials Science Forum, Vol.569 (2008) 181-184

82. Mechanical and Electrical Properties of Ga-Doped ZnO Films Deposited on Flexible Substrate by DC Magnetron Sputtering,D.Y.Lee, J.R. Lee, D.K. Lee, G.H. Lee, Y.S. Kim, P.K. Song,Materials Science Forum, Vol.569 (2008) 185-188

83. Properties of ITO films deposited with different conductivity ITO targets,J.H. Park, S.C. Lee, P.K. Song, METALS AND MATERIALS INTERNATIONAL, Vol.13 (2007) 475-478

84. Characteristics of IZSO films deposited by a co-sputtering system,J.R. Lee, D.G. Kim, G.H. Lee, Y. H. Park,P.K. Song, METALS AND MATERIALS INTERNATIONAL, Vol.13 (2007) 399-402

85. Characteristics of ITO films deposited by DC magnetron sputtering using various sintered Indium-tin Oxide targets,J.H. Park, S.C. Lee, J.H. Lee, P.K. Song, The American Ceramic Society, Vol.198(2007) 421-426

86. Barrier characteristics of ZrN films deposited by remote plasma-enhanced atomic layer deposition using tetrakis(diethylamino)zirconium precursor,Y.D. Kim, S.C. Cho, P.K. Song, H.T. Jeon , K.W. Lee, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,Vol.46 (2007) 4085-4088

87. Role of amorphous silicon carbide in microstructure and mechanical properties of nc-TiC/a-SiCnanocomposite coatings prepared by PECVD,K. H. Kim, J.T. Ok, J.Y. Kang, S.S. Park, P.K. Song, KEY ENGINEERING MATERIALS, Vol.336 (2007)2271-2274

88. Microstructure and electrical properties of ITO films deposited using various ITO targets by magnetron sputtering, J.H. Park, S. C.Lee, J.H. Lee, P.K. Song, SOLID STATE PHENOMENA(2007) 431-434

89. Properties of ITO films deposited on plastic substrate by RF superimposed DC magnetron sputtering method, D.K. Kim, S.H. Lee, M. R.Park, J. Y.Jung, G. H.Lee, P.K. Song, SOLID STATE PHENOMENA (2007)367-370

90. Study on indium tin oxide films deposited using different conductive ITO targets by DC magnetron sputtering, J. H. Park, S. C. Lee, G. H. Lee, P. K. Song, Materials science forum, (2007) 544-545

91. HIgh rate deposition of tin-doped indium oxide films by reactive magnetron sputtering with unipolar pulsing and plasma emission feedback systems, S. Ohno, Y. Kawaguchi, A. Miyamura, Y. Sato, P.K. Song, M. Yoshikawa, P. Frach, Y. Shigesato, Science and Technology of Advanced Materials, Vol.7, pp.56-61

92. Syntheses and mechanical properties of TiAlCxN1-x coatings deposited by arc ion plating, Chul Sik Jang, Jun-Ha Jeon, Pung Keun Song, Myung Chang Kang, Kwang Ho Kim, SURFACE & COATINGS TECHNOLOGY, Vol. (2005) 1501-1506

93. Crystallinity and photocatalytic activity of TiO2 films deposited by reactive sputtering with frequency substrate bias, P.K.Song, Y. Irie, Y. Shigesato, THIN SOLID FILMS, Vol.496 (2005) 121-125

94. Electrical and optical properties of amorphus indium zinc oxide films, N. Ito, Y. Sato, P.K.Song, A. Kaijio, K. Inoue, Y. Shigesato, THIN SOLID FILMS, Vol.496, (2005) 99-103

95. Structural, electrical, and optical properties of transparent conductive In2O3-SnO2 films, Yasushi Sato, Ryo Tokumaru, Eriko Nishimura, P.K.Song, Yuzo Shigesato, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol.23, No.4, (2005) 1167-1172

96. Structures and Electrical Properties of Tin Doped Indium Oxide (ITO) Films Deposited on Different Substrates by Sputtering wirth H2O Introdution, Eriko NISHIMURA, Hideki OHKAWA, Yasushi SATO, P.K.Song, Yuzo SHIGESATO, Journal of Vacuum Society japan, Vol.47, No.11 (2004) 796-801

97. Crystal Structure and Photocatalytic Activity of TiO2 Films Deposited by Reactive Sputtering Using Ne, Ar, Kr, or Xe Gases, Jpn. J. Appl. Phys., Vol. 43 (2004) 442-445.

98. Crystallinity and Photocatalytic Activity of TiO2 Films Deposited by Reactive Sputtering Using Various Magnetic Field Strengths, P. K. Song, Y. Irie, S. Ohno, Y. Sato and Y. Shigesato, Jpn. J. Appl. Phys., Vol. 43 (2004) 358-361.

99. GaN Films Deposited by DC Reactive Magnetron Sputtering, P. K. Song, E. Yoshida, Y. Sato. K. H. Kim and Y. Shigesato, Jpn. J. Appl. Phys., Vol. 43 (2004) 164-166.

100. Photoinduced Hydrophilicity of Epitaxially Grown TiO2 Films by RF Magentron Sputtering, P. K. Song, M. Yamagishi, H. Odaka and Y. Shigesato, Jpn. J. Appl. Phys. Vol. 42 (2003) 1529-1531

101. Microstructure Effect on the High-Temperature Oxidation Resistance of Ti-Si-N Coatings Layers, J. B. Choi, K. Cho, K. H. Kim and P. K. Song, Jpn. J. Appl. Phys. Vol. 42 (2003) 6556-6559.

102. Microstructure of ITO films deposited by DC magnetron sputtering with H2O introduction, E. Nishimura, P. K. Song, H. Ookawa, Y. Shigesato, Thin Solid Films, Vol. 445 (2003) 235-240.

103. Study on In2O3-SnO2 transparent and conductive films prepared by dc magnetron sputtering using high density ceramic targets, K. Utsumi, H. Iigusa, R. Tokumaru, P. K. Song and Y. Shigesato, Thin Solid Films, Vol. 445 (2003) 229-234.

104. Comparative study on structure and internal stress in tin-doped indium oxide (ITO) and indium-zinc oxide (IZO) films deposited by rf magnetron sputtering, T. Sasabayashi, N. Ito, M. Kon, P. K. Song, K. Utsumi, A. Kaijo and Y. Shigesto, Thin Solid Films, Vol. 445 (2003) 219-223.

105. Plasma emission control of reactive sputtering process in mid-frequency mode with dual cathodes to deposit photocatalytic TiO2 films, S. Ohno, D. Sato, M. Kon, P. K. Song, Y. Shigesato, M. Yoshikawa, S. Suzuki and P. Frach, Thin Solid Films, Vol. 445 (2003) 207-212.

106. Study on Thermochromic VO2 Films Grown on ZnO Coated Glass Substrates for "Smart windows, K. Kato, P. K. Song, Y. Shigesato, H. Odaka, Jpn. J. Appl. Phys. Vol.42 (2003) 6523-6531.

107. Thin film TiO2 photocatalyst deposited by reactive magnetron sputtering, M. Yamagishi, S. Kuriki, P. K. Song and Y. Shigesato, Thin Solid Films, Thin Solid Films, 442 (2003) 227-231.

108. Sn- or Hf- Doped InSbO4 Films Deposited by RF Magnetron Sputtering, P. K. Song, Y. Shimada, Y. Shigesato, T. Hattori, M. Ishida and K. Saegusa, Thin Solid Films, 442 (2003) 184-188.

109. Impedance Control of Reactive Sputtering Process in Mid-Frequency Mode with Dual Cathodes to Deposit Al-Doped ZnO Films, M. Kon, P. K. Song, Y. Shigesato, P. Frach, S. Ohno, K. Suzuki, Jpn. J. Appl. Phys. Vol.42, No. 1 (2003) 263-269.

110. Crystallinity of Gallium-Doped Zinc Oxide Films Deposited by DC Magnetron Sputtering Using Ar, Ne or Kr Gas, M. Kon, P. K. Song, A. Mitsui and Y.Shigesato, Jpn. J. Appl. Phys. Vol.41, No. 10, (2002) 6174-6179.

111. Structural and Photocatalytic Properties of Epitaxial TiO2 Films Deposited by Sputtering, M. Yamagishi, Y. Irie, P. K. Song, Y. Shigesato and H. Odaka, Kougyou Zairyou, Vol.50, No.7 (2002) 27-32.

112. Crystallinity and stoichiometry of InNx films deposited by reactive dc magnetron sputtering, Vacuum, P. K. Song, D. Sato, M. Kon and Y. Shigesato, Vol.66 (2002).373-378.

113. Electrical and optical properties of gallium doped zinc oxide films deposited by dc magnetron sputtering, P. K. Song, M. Watanabe, M. Kon, A. Mitsui and Y. Shigesato, Thin Solid Films, Vol.411, (2002) 82-86.

114. Al-Doped ZnO Films Deposited by Reactive Magnetron Sputtering in MF Mode with Dual Cathodes, M. Kon, P. K. Song, Y. Shigesato, P. Frach, A. Mizukami, K. Suzuki, Jpn. J. Appl. Phys. Vol.41, No. 2A, (2002) 814-819.

115. Study on Fluorine-Doped Indium Oxide Films Deposited by RF Magnetron Sputtering, Y. Shigesato, N. Shin, M. Kamei, P. K. Song and I. Yasui, Jpn. J. Appl. Phys. Vol.39, No.11, (2000) 6422-6426.

116. ITO Deposition by Reactive dc Sputtering with Ozone Introduction, Y. Shigesato, N. Ito, M. Kon and P. K. Song, J. Vac. Soc. Jpn. Vol. 43, No.8 (2000) 779-784.

117. DepositionOfHighPerformance CeramicThinFilmsby SputteringMethod, P. K. Song, Y. Shigesato, Jpn. C.T.I, Vol.7 (2000) 26-29.

118. Zinc Oxide as Transparent Conductive Films: P. K. Song, Y. Shigesato, MATERIALS INTEGRATION/ ELECTRONIC CERAMICS, Vol12, No12 (1999) 15-20.

119. The Trend of Transparent Conductive Films based In2O3, Pung Keun Song and Yuzo Shigesato, Monthly DISPLAY, Vol.5, No.9 (1999) 16-21.

120. Structural Control of TCO Films, Pung Keun Song and Yuzo Shigesato, The Journal of the Surface Finishing Society of Japan, Vol.50, No.9 (1999) 771-776.

121. Preparation and Crystallization of Tin-doped and Undoped Amorphous Indium Oxide Films Deposited by Sputtering, Pung Keun Song, Hirotaka Akao, Masayuki Kamei, Yuzo Shigesato and Itaru Yasui, Jpn. J. Appl. Phys Vol.38, No. 9A (1999) 5224-5226.

122. Electrical and Structural Properties of Tin-doped Indium Oxide Films Deposited by DC Sputtering at Room Temperature, Pung Keun Song, Yuzo Shigesato, Masayuki Kamei and Itaru Yasui, Jpn. J. Appl. Phys. Vol. 38, No.5A (1999) 2921-2927.

123. Study on Crystallinity of Tin-doped Indium Oxide Films Deposited by DC Magnetron Sputtering, Pung Keun Song, Yuzo Shigesato, Itaru Yasui, Cleva W. Ow-Yang and David C. Paine, Jpn. J. Appl. Phys. Vol.37, No.4A (1998) 1870-1876